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Detecting plasticity in al thin films by means of bulge test
Holzer, Jakub ; Pikálek, Tomáš ; Buchta, Zdeněk ; Lazar, Josef ; Tinoco, H.A. ; Chlupová, Alice ; Náhlík, Luboš ; Sobota, Jaroslav ; Fořt, Tomáš ; Kruml, Tomáš
The Bulge test proved to be a useful tool for measuring elastic properties of thin films and\nfree standing membranes, particularly Young’s modulus and residual stress. The basic principle\nof bulge test is application of differential pressure on one side of the a membrane, measurement of\nthe shape of bulged surface as a function of pressure, in this case via laser interferometer, and\nevaluation of a pressure-deflection relationship. In this study, bilayer membrane consisting of a\nsilicon nitride supporting layer and an aluminium layer deposited by means of magnetron\nsputtering is subjected to the bulge test. The results clearly show signs of a non-linear behavior\nthat is caused by plastic deformation in the aluminium layer. Finite element analysis is being\ndeveloped to describe this behavior because analytical model using deflection of central point and\npressure relation falls apart in case of non-linearity.
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